Flow Sensor

Flow Sensor

Flow sensor to verify suction lift of small workpieces, which is difficult to detect with pressure sensors, improving flow management.

Specifications

Type test 10 100 101 20 200 201 5 50 500
Accumulation Max flow rate 9999999mL 99999.99L 999999.9L 99999.99L 999999.9L 9999999L 9999999mL 99999.99L 999999.9L
Accumulation Mini. Unit setting 1mL 0.01mL 0.1mL 0.01mL 0.1mL 1mL 1mL 0.01mL 0.1mL
Accumulation pulse output rate 10mL 0.1mL 1L 0.02mL 0.2mL 2L 5mL 0.05mL 0.5mL
Ambient Temperature & Humidity 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH 0 to 50ºC, max. 90% RH
Analog output A Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O Current output 4 to 20mA (connected impedance: 0 to 300O
Analog output V 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO) 1 voltage output 1 to 5V (connected load impedance: min. 50kO)
Assured accuracy range 3~100%F.S. 3~100%F.S. 3~100%F.S. 3~100%F.S. 3~100%F.S. 3~100%F.S. 3~100%F.S. 3~100%F.S. 3~100%F.S.
Built-in Needle Valve N (9*) o:available o:available o:available o:available o:available o:available o:available o:available o:available
Current Consumption Max. 50mA Max. 50mA Max. 50mA Max. 50mA Max. 50mA Max. 50mA Max. 50mA Max. 50mA Max. 50mA
Display Method 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD 4 digits + 4 digits, 2 color LCD
EMC directive Conformity Conformity Conformity Conformity Conformity Conformity Conformity Conformity Conformity
Flow Rate Display Minimum unit setting 1mL/min 0.01mL/min 0.1mL/min 0.01mL/min 0.1mL/min 1mL/min 1mL/min 0.01mL/min 0.1mL/min
Flow Rate Display Range F 0~1000mL/min 0~10.00mL/min 0~100.00mL/min 0~2.00mL/min 0~20.00mL/min 0~200.00mL/min 0~500mL/min 0~5.00mL/min 0~50.00mL/min
Flow Rate Display Range R -1000~1000mL/min -10.00~10.00mL/min -100.00~100.00mL/min -2.00~2.00mL/min -20.00~20.00mL/min -200.00~200.00mL/min -500~500mL/min -5.00~5.00mL/min -50.00~50.00mL/min
Fluid Medium Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas
Function Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other Flow rate display, flow rate - peak hold, switch output, analog output, and other
Installing Orientation Horizontal or Vertical Horizontal or Vertical Horizontal or Vertical Horizontal or Vertical Horizontal or Vertical Horizontal or Vertical Horizontal or Vertical Horizontal or Vertical Horizontal or Vertical
Lead Wire ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm
Linearity (display/analog output) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC) Max ± 3%F.S. (Air vent for secondary side, 25ºC)
Max working pressure 0.7MPA 0.7MPA 0.7MPA 0.7MPA 0.7MPA 0.7MPA 0.7MPA 0.7MPA 0.7MPA
Min working pressure -0.09MPa -0.09MPa -0.09MPa -0.09MPa -0.09MPa -0.09MPa -0.09MPa -0.09MPa -0.09MPa
Port Size ø10mm Quick-fitting o:available o:available
Port Size ø4mm Quick-fitting o:available o:available o:available o:available o:available o:available
Port Size ø6mm Quick-fitting o:available o:available o:available o:available o:available o:available o:available
Port Size ø8mm Quick-fitting o:available o:available o:available
Power supply voltage A DC24V (21.6~26.4V) DC24V (21.6~26.4V) DC24V (21.6~26.4V) DC24V (21.6~26.4V) DC24V (21.6~26.4V) DC24V (21.6~26.4V) DC24V (21.6~26.4V) DC24V (21.6~26.4V) DC24V (21.6~26.4V)
Power supply voltage V DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V) DC12~24V (10.8~26.4V)
Pressure characteristics Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference)
Protective Circuit Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection Power supply and switch output reverse connection protections, and switch output load short-circuit protection
Protective Structure IEC standard: IP40 IEC standard: IP40 IEC standard: IP40 IEC standard: IP40 IEC standard: IP40 IEC standard: IP40 IEC standard: IP40 IEC standard: IP40 IEC standard: IP40
Repeatability Max ± 1%F.S. Max ± 1%F.S. Max ± 1%F.S. Max ± 1%F.S. Max ± 1%F.S. Max ± 1%F.S. Max ± 1%F.S. Max ± 1%F.S. Max ± 1%F.S.
Response Time Max. 50ms Max. 50ms Max. 50ms Max. 50ms Max. 50ms Max. 50ms Max. 50ms Max. 50ms Max. 50ms
Straight pipe introduction Not required Not required Not required Not required Not required Not required Not required Not required Not required
Switch output N 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V)
Switch output P 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V)
Temperature Characteristics Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference)
Withstand pressure 1MPa 1MPa 1MPa 1MPa 1MPa 1MPa 1MPa 1MPa 1MPa
Working Fluid Temperature 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation) 0 to 50ºC (no dew condensation)

Models

Downloads

FUS20
one-way flow
2DXF ACIS IGES Parasolid STEP
FUS20
bidirectional flow
2DXF ACIS IGES Parasolid STEP
FUS20
built-in needle flow adjustment
2DXF ACIS IGES Parasolid STEP
FUS20-CS
cable wire
2DXF ACIS IGES Parasolid STEP
FUS20-B1
bracket
2DXF ACIS IGES Parasolid STEP
FUS20-P
panel mount kit for no needle type
2DXF ACIS IGES Parasolid STEP
FUS20-PN
panel mount kit for needle type
2DXF ACIS IGES Parasolid STEP
FUS8
Flow Sensor
2DXF IGES

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