Flow sensor to verify suction lift of small workpieces, which is difficult to detect with pressure sensors, improving flow management.
Type test | 10 | 100 | 101 | 20 | 200 | 201 | 5 | 50 | 500 |
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Accumulation Max flow rate | 9999999mL | 99999.99L | 999999.9L | 99999.99L | 999999.9L | 9999999L | 9999999mL | 99999.99L | 999999.9L |
Accumulation Mini. Unit setting | 1mL | 0.01mL | 0.1mL | 0.01mL | 0.1mL | 1mL | 1mL | 0.01mL | 0.1mL |
Accumulation pulse output rate | 10mL | 0.1mL | 1L | 0.02mL | 0.2mL | 2L | 5mL | 0.05mL | 0.5mL |
Ambient Temperature & Humidity | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH | 0 to 50ºC, max. 90% RH |
Analog output A | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O | Current output 4 to 20mA (connected impedance: 0 to 300O |
Analog output V | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) | 1 voltage output 1 to 5V (connected load impedance: min. 50kO) |
Assured accuracy range | 3~100%F.S. | 3~100%F.S. | 3~100%F.S. | 3~100%F.S. | 3~100%F.S. | 3~100%F.S. | 3~100%F.S. | 3~100%F.S. | 3~100%F.S. |
Built-in Needle Valve N (9*) | o:available | o:available | o:available | o:available | o:available | o:available | o:available | o:available | o:available |
Current Consumption | Max. 50mA | Max. 50mA | Max. 50mA | Max. 50mA | Max. 50mA | Max. 50mA | Max. 50mA | Max. 50mA | Max. 50mA |
Display Method | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD | 4 digits + 4 digits, 2 color LCD |
EMC directive | Conformity | Conformity | Conformity | Conformity | Conformity | Conformity | Conformity | Conformity | Conformity |
Flow Rate Display Minimum unit setting | 1mL/min | 0.01mL/min | 0.1mL/min | 0.01mL/min | 0.1mL/min | 1mL/min | 1mL/min | 0.01mL/min | 0.1mL/min |
Flow Rate Display Range F | 0~1000mL/min | 0~10.00mL/min | 0~100.00mL/min | 0~2.00mL/min | 0~20.00mL/min | 0~200.00mL/min | 0~500mL/min | 0~5.00mL/min | 0~50.00mL/min |
Flow Rate Display Range R | -1000~1000mL/min | -10.00~10.00mL/min | -100.00~100.00mL/min | -2.00~2.00mL/min | -20.00~20.00mL/min | -200.00~200.00mL/min | -500~500mL/min | -5.00~5.00mL/min | -50.00~50.00mL/min |
Fluid Medium | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas | Clean air (JIS B8392-1.1.1 to 5.6.2), Compressed air (JIS B8392-1.1.1 to 1.6.2), and nitrogen gas |
Function | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other | Flow rate display, flow rate - peak hold, switch output, analog output, and other |
Installing Orientation | Horizontal or Vertical | Horizontal or Vertical | Horizontal or Vertical | Horizontal or Vertical | Horizontal or Vertical | Horizontal or Vertical | Horizontal or Vertical | Horizontal or Vertical | Horizontal or Vertical |
Lead Wire | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm | ø3.7 AWG26 equiv. x 5 core cable (connector joint), Insulator O.D. ø1. 0mm |
Linearity (display/analog output) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) | Max ± 3%F.S. (Air vent for secondary side, 25ºC) |
Max working pressure | 0.7MPA | 0.7MPA | 0.7MPA | 0.7MPA | 0.7MPA | 0.7MPA | 0.7MPA | 0.7MPA | 0.7MPA |
Min working pressure | -0.09MPa | -0.09MPa | -0.09MPa | -0.09MPa | -0.09MPa | -0.09MPa | -0.09MPa | -0.09MPa | -0.09MPa |
Port Size ø10mm Quick-fitting | o:available | o:available | |||||||
Port Size ø4mm Quick-fitting | o:available | o:available | o:available | o:available | o:available | o:available | |||
Port Size ø6mm Quick-fitting | o:available | o:available | o:available | o:available | o:available | o:available | o:available | ||
Port Size ø8mm Quick-fitting | o:available | o:available | o:available | ||||||
Power supply voltage A | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) | DC24V (21.6~26.4V) |
Power supply voltage V | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) | DC12~24V (10.8~26.4V) |
Pressure characteristics | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) | Max ± 5%F.S. (-0.09 to 0.7MPa, where air vent for secondary side reference) |
Protective Circuit | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection | Power supply and switch output reverse connection protections, and switch output load short-circuit protection |
Protective Structure | IEC standard: IP40 | IEC standard: IP40 | IEC standard: IP40 | IEC standard: IP40 | IEC standard: IP40 | IEC standard: IP40 | IEC standard: IP40 | IEC standard: IP40 | IEC standard: IP40 |
Repeatability | Max ± 1%F.S. | Max ± 1%F.S. | Max ± 1%F.S. | Max ± 1%F.S. | Max ± 1%F.S. | Max ± 1%F.S. | Max ± 1%F.S. | Max ± 1%F.S. | Max ± 1%F.S. |
Response Time | Max. 50ms | Max. 50ms | Max. 50ms | Max. 50ms | Max. 50ms | Max. 50ms | Max. 50ms | Max. 50ms | Max. 50ms |
Straight pipe introduction | Not required | Not required | Not required | Not required | Not required | Not required | Not required | Not required | Not required |
Switch output N | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (NPN open collector output:max 50mA, voltage drop: max. 2.4V) |
Switch output P | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) | 2 points output (PNP open collector output:max 50mA, voltage drop: max. 2.4V) |
Temperature Characteristics | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) | Max ± 0.2%F.S./ºC (15 to 35ºC, where 25ºC is reference) |
Withstand pressure | 1MPa | 1MPa | 1MPa | 1MPa | 1MPa | 1MPa | 1MPa | 1MPa | 1MPa |
Working Fluid Temperature | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) | 0 to 50ºC (no dew condensation) |
Models |
Downloads |
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FUS20 one-way flow |
2DXF | ACIS | IGES | Parasolid | STEP | ||
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FUS20 bidirectional flow |
2DXF | ACIS | IGES | Parasolid | STEP | ||
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FUS20 built-in needle flow adjustment |
2DXF | ACIS | IGES | Parasolid | STEP | ||
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FUS20-CS cable wire |
2DXF | ACIS | IGES | Parasolid | STEP | ||
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FUS20-B1 bracket |
2DXF | ACIS | IGES | Parasolid | STEP | ||
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FUS20-P panel mount kit for no needle type |
2DXF | ACIS | IGES | Parasolid | STEP | ||
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FUS20-PN panel mount kit for needle type |
2DXF | ACIS | IGES | Parasolid | STEP | ||
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FUS8 Flow Sensor |
2DXF | IGES | |||||